Optimized Si/SiO2 high contrast grating mirror design for mid-infrared wavelength range: robustness enhancement

摘要

A high reflectivity and polarization selective high contrast grating mirrorhas been designed with the use of an automated optimization algorithm. Througha precise study of the tolerance of the different lengths of the structure, therobustness with respect to the fabrication errors has been enhanced to hightolerance values between 5 % and 210 %. This adjustment of the dimensions ofthe structure leads to a 250 nm large bandwidth mirror well adapted for a VCSELapplication at \lambda = 2.65 $\mu$m and can easily be scaled for otherwavelengths.